JPH0524208Y2 - - Google Patents
Info
- Publication number
- JPH0524208Y2 JPH0524208Y2 JP1987106887U JP10688787U JPH0524208Y2 JP H0524208 Y2 JPH0524208 Y2 JP H0524208Y2 JP 1987106887 U JP1987106887 U JP 1987106887U JP 10688787 U JP10688787 U JP 10688787U JP H0524208 Y2 JPH0524208 Y2 JP H0524208Y2
- Authority
- JP
- Japan
- Prior art keywords
- cover glass
- solid
- inspected
- light
- header
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000006059 cover glass Substances 0.000 claims description 57
- 238000007689 inspection Methods 0.000 claims description 25
- 238000003384 imaging method Methods 0.000 claims description 18
- 239000011347 resin Substances 0.000 claims description 7
- 229920005989 resin Polymers 0.000 claims description 7
- 238000012544 monitoring process Methods 0.000 claims 1
- 230000007547 defect Effects 0.000 description 11
- 239000011521 glass Substances 0.000 description 4
- 238000011179 visual inspection Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000008929 regeneration Effects 0.000 description 2
- 238000011069 regeneration method Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Testing, Inspecting, Measuring Of Stereoscopic Televisions And Televisions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987106887U JPH0524208Y2 (en]) | 1987-07-11 | 1987-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987106887U JPH0524208Y2 (en]) | 1987-07-11 | 1987-07-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6415952U JPS6415952U (en]) | 1989-01-26 |
| JPH0524208Y2 true JPH0524208Y2 (en]) | 1993-06-21 |
Family
ID=31340799
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987106887U Expired - Lifetime JPH0524208Y2 (en]) | 1987-07-11 | 1987-07-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0524208Y2 (en]) |
-
1987
- 1987-07-11 JP JP1987106887U patent/JPH0524208Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6415952U (en]) | 1989-01-26 |
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